Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry - Search Results

guest :: login

Home > Search Results: Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

Search collections:

Sort by:	Display results:	Output format:

Results overview: Found 1 records in 0.09 seconds.
Articles, 1 records found

Articles	1 records found

9 p, 5.1 MB

Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry / Vidal Álvarez, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Marigó Ferrer, Eloi (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Torres, Francesc 1948- (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. [...]
2016 - DOI (Digital Object Identifier)

10.3390/mi7030040
Micromachines, Vol. 7 N. 3 (March 2016) , p. 1-9

Detailed record -

Interested in being notified about new results for this query?
Set up a personal email alert or subscribe to the RSS feed.