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11 p, 1.1 MB Array of Microfluidic Beam Resonators for Density and Viscosity Analysis of Liquids / Márquez, Salomón (Institut Català de Nanociència i Nanotecnologia) ; Alvarez, Mar (Institut de Microelectrònica de Barcelona) ; Fariña, David (Institut Català de Nanociència i Nanotecnologia) ; Homs Corbera, Antoni (Institut Català de Nanociència i Nanotecnologia) ; Dominguez, Carlos (Institut de Microelectrònica de Barcelona) ; Lechuga, Laura M (Institut Català de Nanociència i Nanotecnologia)
This paper reports on the design, fabrication, and evaluation of a mass density and viscosity sensor based on an array of polysilicon microbeam resonators integrated with 20 pL fluidic microchannels. [...]
2017 - 10.1109/JMEMS.2017.2709944
Journal of microelectromechanical systems, Vol. 26, Issue 4 (August 2017) , p. 749-757  

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