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6 p, 228.6 KB Resistive switching like-behavior in MOSFETs with ultra-thin HfSiON dielectric gate stack : pMOS and nMOS comparison and reliability implications / Crespo Yepes, Albert (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Martin Martinez, Javier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Rodríguez Martínez, Rosana (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Nafría i Maqueda, Montserrat (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Aymerich Humet, Xavier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
In this work, the Resistive Switching (RS) phenomenon in n and pMOSFETs with ultrathin Hf based high-k dielectric is studied. Two different conductive levels, a high (HRS) and a low (LRS) resistance states can be distinguished in the dielectric. [...]
2013 - 10.1016/j.microrel.2013.07.046
Microelectronics reliability, Vol. 53, No. 9-11 (Sep.-Nov. 2013) , p. 1247-1251  
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