Published articles

Published articles 1 records found  Search took 0.01 seconds. 
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17 p, 2.7 MB Conductive-AFM topography and current maps simulator for the study of polycrystalline high-k dielectrics / Couso, C. (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Porti i Pujal, Marc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Martín Martínez, Javier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Iglesias, V. (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Nafría i Maqueda, Montserrat (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Aymerich Humet, Xavier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
In this work, a simulator of conductive atomic force microscopy (C-AFM) was developed to reproduce topography and current maps. In order to test the results, the authors used the simulator to investigate the influence of the C-AFM tip on topography measurements of polycrystalline high-k dielectrics, and compared the results with experimental data. [...]
2015 - 10.1116/1.4915328
Journal of Vaccuum Science and Technology B, Vol. 33 No. 3 (May-June 2015) , p031801/1-031801/6  

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