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11 p, 3.8 MB Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns / Gottlieb, Steven (Institut de Microelectrònica de Barcelona) ; Rösner, Benedikt (Paul Scherrer Institut) ; Evangelio Araujo, Laura (Institut de Microelectrònica de Barcelona) ; Fernández Regúlez, Marta (Institut de Microelectrònica de Barcelona) ; Nogales, Aurora (Instituto de Estructura de la Materia) ; García Gutiérrez, Mari Cruz (Instituto de Estructura de la Materia) ; Keller, Thomas F. (Universität Hamburg) ; Fraxedas i Calduch, Jordi (Institut Català de Nanociència i Nanotecnologia) ; Ezquerra, Tiberio A. (Instituto de Estructura de la Materia) ; David, Christian (Paul Scherrer Institut) ; Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
In this paper, we investigate the directed self-assembly of block copolymers in topographical guiding patterns with feature sizes in the range of the block copolymer half-pitch. In particular, we present the self-assembly of an 11. [...]
2019 - 10.1039/c8me00046h
Molecular systems design and engineering, Vol. 4, Issue 1 (February 2019) , p. 175-185  

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