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4 p, 355.8 KB Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry / Forsen, E. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Ghatnekar-Nilsson, S. (University of Lund. Solid State Physics and The Nanometer Consortium) ; Teva Meroño, Jordi (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Verd Martorell, Jaume (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Sandberg, R. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Svendsen, W. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Esteve, Jaume (Institut de Microelectrònica de Barcelona) ; Figueras Costa, Eduardo (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Campabadal, Francesca (Institut de Microelectrònica de Barcelona) ; Montelius, L. (University of Lund. Solid State Physics and The Nanometer Consortium) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Boisen, A. (Technical University of Denmark. Department of Micro and Nanotechnology) ; American Physical Society
Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor(CMOS) chips. Fabricatedresonatorsystems have been designed to have resonance frequencies up to 1. [...]
2005 - 10.1063/1.1999838
Applied physics letters, Vol. 87, Issue 4 (July 2005) , p. 043507/1- 043507/3  
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