Home > Search Results: Morales Sánchez, Alfredo
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140 p, 3.8 MB Correlation between optical and electrical properties of materials containing nanoparticles / Morales Sánchez, Alfredo ; Dominguez, Carlos, dir. (Centro Nacional de Microelectrónica) ; Aceves Mijares, Mariano, dir. (Instituto Nacional de Astrofísica, Óptica y Electrónica)
En esta tesis, capas de óxido de silicio rico en silicio [SRO, (SiOx, x<2)] con diferentes excesos de silicio fueron depositadas por medio de la técnica de depósito químico en fase vapor a baja presión (LPCVD). [...]
In this thesis, silicon rich oxide [SRO, (SiOx, x<2)] films with different silicon excesses were deposited by low pressure chemical vapor deposition (LPVCD). Besides, Si implanted SRO (SI-SRO) films were also fabricated. [...]
Bellaterra : Universitat Autònoma de Barcelona, 2009  
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