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4 p, 392.4 KB Predictive model for scanned probe oxidation kinetics / Dagata, J. A. (National Institute of Standards and Technology (Gaithersburg, Estats Units d'Amèrica)) ; Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Morimoto, K. (Matsushita Electrical Industrial (Osaka, Japó)) ; Inoue, T. (Electrotechnical Laboratory (Tsukuba, Japó)) ; Itoh, J. (Electrotechnical Laboratory (Tsukuba, Japó)) ; Yokoyama, H. (Electrotechnical Laboratory (Tsukuba, Japó)) ; American Physical Society
Previous descriptions of scanned probe oxidation kinetics involved implicit assumptions that one-dimensional, steady-state models apply for arbitrary values of applied voltage and pulse duration. These assumptions have led to inconsistent interpretations regarding the fundamental processes that contribute to control of oxide growth rate. [...]
2000 - 10.1063/1.126451
Applied Physics Letters, Vol. 76, Issue 19 (March 2000) , p. 2710-2712  

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