Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
Torres, Francesc 1948- (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Sobreviela, Guillermo
Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Riverola, Martín

Date:	2016
Abstract:	Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0. 013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0. 3 ppm).
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	MEMS ; Synchronization ; Resonators ; CMOS-MEMS ; Cantilevers ; Arrays ; Coupling
Published in:	Sensors (Basel, Switzerland), Vol. 16 Núm. 10 (October 2016) , art. 1690, ISSN 1424-8220

DOI: 10.3390/s16101690
PMID: 27754377

15 p, 4.1 MB

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