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74 p, 5.4 MB Integration of nanomechanical sensors on CMOS by nanopatterning methods / Arcamone, Julien ; Pérez Murano, Francesc, dir. (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Brémond, Georges, dir. (Centre National de la Recherche Scientifique (França))
La presente tesis ha sido realizada principalmente en el Centro Nacional de Microelectrónica de Barcelona (CNM-IMB) del CSIC, y en parte también en el Instituto de Nanotecnología de Lyon (Francia) del CNRS. [...]
This thesis has been a co-direction between Dr. F. Pérez-Murano from CNM-CSIC, Barcelona (Spain) and Pr. G. Brémond from INSA Lyon/INL-CNRS (France). This work involves two main aspects: one has to see with the modeling, the design and the operation of a nanomechanical device integrated on CMOS, and the other on nanofabrication techniques. [...]
Bellaterra : Universitat Autònoma de Barcelona, 2007
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