Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators
Campanella, Humberto (Centro Nacional de Microelectrónica)
Esteve, Jaume (Centro Nacional de Microelectrónica)
Montserrat, Josep (Centro Nacional de Microelectrónica)
Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Romano Rodríguez, Alberto (Universitat de Barcelona. Departament d'Electrònica)
American Physical Society

Date:	2006
Abstract:	A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1. 58×10−8g/cm2 and 7×10−15g, respectively.
Rights:	Tots els drets reservats.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Sputter deposition ; Electrodes ; Electrodeposition ; Nanoelectromechanical systems ; Thin film deposition ; Thin film devices ; Acoustic resonators ; AlN films ; III-V semiconductors ; Silicon
Published in:	Applied physics letters, Vol. 89, Issue 3 (July 2006) , p. 033507/1-033507/3, ISSN 1077-3118

DOI: 10.1063/1.2234305

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