ISFET Based Microsensors for Environmental Monitoring
Jimenez-Jorquera, Cecilia (Universitat Autònoma de Barcelona. Departament de Microelectrònica i Sistemes Electrònics)
Orozco, Jahir
Baldi Coll, Antoni (Universitat Autònoma de Barcelona. Departament de Microelectrònica i Sistemes Electrònics)

Date:	2009
Abstract:	The use of microsensors for in-field monitoring of environmental parameters is gaining interest due to their advantages over conventional sensors. Among them microsensors based on semiconductor technology offer additional advantages such as small size, robustness, low output impedance and rapid response. Besides, the technology used allows integration of circuitry and multiple sensors in the same substrate and accordingly they can be implemented in compact probes for particular applications e. g. , in situ monitoring and/or on-line measurements. In the field of microsensors for environmental applications, Ion Selective Field Effect Transistors (ISFETs) have a special interest. They are particularly helpful for measuring pH and other ions in small volumes and they can be integrated in compact flow cells for continuous measurements. In this paper the technologies used to fabricate ISFETs and a review of the role of ISFETs in the environmental field are presented.
Grants:	Ministerio de Educación y Ciencia TEC2007-68012-C03-01
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Document:	Article
Subject:	ISFETs ; Microsensors ; Environmental monitoring
Published in:	Sensors (Basel, Switzerland), Vol. 10 (12 2009), p. 61-83, ISSN 1424-8220

23 p, 387.5 KB

The record appears in these collections:
Articles > Research articles
Articles > Published articles