Functional dependence of resonant harmonics on nanomechanical parameters in dynamic mode atomic force microscopy
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia)
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona)
Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona)
Rull Trinidad, Enrique (Technische Universiteit Delft)
Staufer, Urs (Technische Universiteit Delft)
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)

Date:	2017
Abstract:	We present a combined theoretical and experimental study of the dependence of resonant higher harmonics of rectangular cantilevers of an atomic force microscope (AFM) as a function of relevant parameters such as the cantilever force constant, tip radius and free oscillation amplitude as well as the stiffness of the sample's surface. The simulations reveal a universal functional dependence of the amplitude of the 6th harmonic (in resonance with the 2nd flexural mode) on these parameters, which can be expressed in terms of a gun-shaped function. This analytical expression can be regarded as a practical tool for extracting qualitative information from AFM measurements and it can be extended to any resonant harmonics. The experiments confirm the predicted dependence in the explored 3-45 N/m force constant range and 2-345 GPa sample's stiffness range. For force constants around 25 N/m, the amplitude of the 6th harmonic exhibits the largest sensitivity for ultrasharp tips (tip radius below 10 nm) and polymers (Young's modulus below 20 GPa).
Grants:	European Commission 309558 Ministerio de Economía y Competitividad SEV-2013-0295 Ministerio de Economía y Competitividad CSD2010-00024
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Atomic force microscopy ; Metrology ; Multifrequency ; Nanomechanics
Published in:	Beilstein journal of nanotechnology, Vol. 8 (April 2017) , p. 883-891, ISSN 2190-4286

DOI: 10.3762/bjnano.8.90
PMID: 28503399

9 p, 1.3 MB

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Research literature > UAB research groups literature > Research Centres and Groups (research output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles