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Página principal > Artículos > Artículos publicados > Room-temperature silicon platform for GHz-frequency nanoelectro-opto-mechanical systems |
Fecha: | 2022 |
Resumen: | Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2. 6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains. |
Ayudas: | European Commission 885689 European Commission 713450 Agencia Estatal de Investigación PGC2018-094490-B-C21 Ministerio de Ciencia e Innovación PGC2018-101743-B-I00 Ministerio de Economía y Competitividad SEV-2019-0706 |
Nota: | Altres ajuts: . A.M. acknowledges support from MCIN (ICTS-2017-28-UPV-9), from Generalitat Valenciana (BEST/2020/178, PROMETEO/2019/123, and IDIFEDER/2021/061) and from "Unión Europea NextGenerationEU/PRTR" |
Derechos: | Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original. |
Lengua: | Anglès |
Documento: | Article ; recerca ; Versió publicada |
Materia: | Cavity optomechanics ; Nanoelectro-opto-mechanical systems (NEOMS) ; Silicon photonics ; Interdigitated transducers ; Microwave-to-optics conversion |
Publicado en: | ACS Photonics, Vol. 9, issue 2 (Feb. 2022) , p. 413-419, ISSN 2330-4022 |
7 p, 2.9 MB |