Index of artpub/2018/pmc_30405006/

Riverola, Martín
High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer
2018
https://ddd.uab.cat/record/228068
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[ ]1=Riverola,_Martin2022-06-29 13:33 18  
[ ]2=High_Performance_Seesaw_Torsional_CMOS-MEMS...2022-06-29 13:33 75  
[ ]3=20182022-06-29 13:33 5  
[ ]4=2280682022-06-29 13:33 34  
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