Fabrication and replication of re-entrant structures by nanoimprint lithography methods
Kehagias, Nikolaos (Institut Català de Nanociència i Nanotecnologia)
Francone, Achille (Institut Català de Nanociència i Nanotecnologia)
Guttmann, Markus (Karlsruhe Institute of Technology)
Winkler, Frank (Karlsruhe Institute of Technology)
Fernández Estévez, Ariadna (Institut Català de Nanociència i Nanotecnologia)
Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia)

Date:	2018
Abstract:	In this work, the authors present and demonstrate a simple method to fabricate and mass replicate re-entrant structures. The method consists of the direct imprinting of polymer mushroomlike microstructures produced by a combination of photolithography and nickel up-plating process. In particular, they have studied the conditions to generate highly robust mushroomlike topographies and their topographical impact on the replication process. They discuss all the imprinting conditions suitable to replicate such topographies using both ultraviolet light assisted nanoimprint lithography (UV-NIL) and thermal NIL methods in two polymer films, poly(methyl methacrylate) and polypropylene, and a hybrid (organic-inorganic) UV light curable photoresist, namely, Ormocomp. Re-entrant topographies have been widely studied for liquid/oil repelling and dry adhesive properties, whereas in their experiments, they have proved evidence for their amphiphobic potential.
Grants:	Ministerio de Economía y Competitividad SEV-2013-0295 European Commission 721062
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Dry adhesive ; Organic-inorganic ; Plating process ; Replication process ; SIMPLE method ; Ultra-violet light
Published in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol. 36, Issue 6 (November 2018) , art. 6JF01, ISSN 2166-2754

DOI: 10.1116/1.5048241

7 p, 1.9 MB

The record appears in these collections:
Research literature > UAB research groups literature > Research Centres and Groups (research output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles