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Tailored height gradients in vertical nanowire arrays via mechanical and electronic modulation of metal-assisted chemical etching
Otte Ortiz, Marinus Albertus (Institut Català de Nanociència i Nanotecnologia)
Solís Tinoco, Verónica Iraís (Institut Català de Nanociència i Nanotecnologia)
Prieto, Pilar (Instituto de Microelectrónica de Madrid)
Borrisé Nogué, Xavier (Institut Català de Nanociència i Nanotecnologia)
Lechuga, Laura M. (Institut Català de Nanociència i Nanotecnologia)
González, M.U. (Instituto de Microelectrónica de Madrid)
Sepúlveda Martínez, Borja (Institut Català de Nanociència i Nanotecnologia)

Date: 2015
Abstract: In current top-down nanofabrication methodologies the design freedom is generally constrained to the two lateral dimensions, and is only limited by the resolution of the employed nanolithographic technique. However, nanostructure height, which relies on certain mask-dependent material deposition or etching techniques, is usually uniform, and on-chip variation of this parameter is difficult and generally limited to very simple patterns. Herein, a novel nanofabrication methodology is presented, which enables the generation of high aspect-ratio nanostructure arrays with height gradients in arbitrary directions by a single and fast etching process. Based on metal-assisted chemical etching using a catalytic gold layer perforated with nanoholes, it is demonstrated how nanostructure arrays with directional height gradients can be accurately tailored by: (i) the control of the mass transport through the nanohole array, (ii) the mechanical properties of the perforated metal layer, and (iii) the conductive coupling to the surrounding gold film to accelerate the local electrochemical etching process. The proposed technique, enabling 20-fold on-chip variation of nanostructure height in a spatial range of a few micrometers, offers a new tool for the creation of novel types of nano-assemblies and metamaterials with interesting technological applications in fields such as nanophotonics, nanophononics, microfluidics or biomechanics. Based on metal-assisted chemical etching using a catalytic gold layer perforated with nanoholes, it is demonstrated how high aspect-ratio nanostructure arrays with directional height gradients can be accurately tailored by: i) control of mass transport through the nanohole array, ii) mechanical properties of the perforated metal layer, and iii) conductive coupling to the surrounding gold film to accelerate the local electrochemical etching process. The proposed technique, enabling 20-­-fold on-­-chip variation of nanostructure height in a spatial range of a few microns, offers a new tool for the creation of novel types of nano-­-assemblies and metamaterials with interesting technological applications in fields such as nanophotonics, nanophononics, microfluidics or biomechanics.
Note: Número d'acord de subvenció MINECO/MAT2011-12645-­E
Note: Número d'acord de subvenció MINECO/TEC2012-­34280
Note: Número d'acord de subvenció MINECO/MAT2011-29194-C02-­01
Note: Número d'acord de subvenció MINECO/MAT2013-48628-­R
Note: Número d'acord de subvenció MINECO/SEV-­2013-­0295
Rights: Tots els drets reservats.
Language: Anglès.
Document: article ; recerca ; acceptedVersion
Subject: Nanofabrication ; Height gradients ; High aspect-­ratio vertical nanowires ; Metal assisted chemical etching ; Metamaterials
Published in: Small, Vol. 11, Issue 33 (September 2015) , p. 4201-4208, ISSN 1613-6829

DOI: 10.1002/smll.201500175


Postprint
32 p, 5.3 MB

The record appears in these collections:
Research literature > UAB research groups literature > Research Centres and Groups (scientific output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles

 Record created 2019-09-23, last modified 2020-02-29



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