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Defects in nano-imprint lithography line patterns :
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Defects in nano-imprint lithography line patterns : computational modelling and measurement accuracy
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Constantoudis, Vassilios
(Institute of Nanoscience and Nanotechnology (Grècia))
;
Whitworth, Guy L.
(Institut Català de Nanociència i Nanotecnologia) ;
Kehagias, Nikolaos
(Institut Català de Nanociència i Nanotecnologia) ;
Papavieros, George
(Aristotle University of Thessaloniki. Physics Department) ;
Sotomayor Torres, Clivia M.
(Institut Català de Nanociència i Nanotecnologia) ;
Gogolides, Evangelos
(Institute of Nanoscience and Nanotechnology (Grècia))
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