Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies
Visser, Dennis ![Identificador ORCID](/img/uab/orcid.ico)
(Kungl. Tekniska högskolan (Estocolm (Suècia))
Jaramillo Fernández, Juliana ![Identificador ORCID](/img/uab/orcid.ico)
(Kungl. Tekniska högskolan (Estocolm (Suècia))
Haddad, Gabriel (Kungl. Tekniska högskolan (Estocolm (Suècia))
Sotomayor Torres, Clivia M. ![Identificador ORCID](/img/uab/orcid.ico)
(Institut Català de Nanociència i Nanotecnologia)
Anand, Srinivasan ![Identificador ORCID](/img/uab/orcid.ico)
(Kungl. Tekniska högskolan (Estocolm (Suècia))
Fecha: |
2020 |
Resumen: |
Ion sputtering assisted formation of nanopillars is demonstrated as a wafer-scale, lithography-free fabrication method to obtain high optical quality gallium indium phosphide (GaInP) nanopillars. Compared to binary materials, little has been reported on the formation of self-organized ternary nanostructures. Epitaxial (100) GaInP layers lattice matched to GaAs were sputtered by nitrogen (N) ions with relatively low ion beam energies (∼400 eV) to reduce ion bombardment induced damage. The influence of process parameters such as temperature, sputter duration, ion beam energy, and ion beam incidence angle on the pillar formation is investigated. The fabricated GaInP nanopillars have average diameters of ∼75-100 nm, height of ∼220 nm, and average density of ∼2-4 × 10 pillars/cm. The authors show that the ion beam incidence angle plays an important role in pillar formation and can be used to tune the pillar shape, diameter, and spatial density. Specifically, tapered to near cylindrical pillar profiles together with a reduction in their average diameters are obtained by varying the ion beam incidence angle from 0° to 20°. A tentative model for the GaInP nanopillar formation is proposed based on transmission electron microscopy and chemical mapping analysis. μ-Photoluminescence and μ-Raman measurements indicate a high optical quality of the c-GaInP nanopillars. |
Nota: |
The authors would like to acknowledge the support from the Linné Center for Advanced Optics and Photonics (ADOPT; Grant No. 349-2007-8664), the Swedish Research Council (VR), and the Swedish Energy Agency (Energimynigheten; Grant Nos. 45199-1 and 42028-1). The authors thank Frederik Gustavsson for the TEM and EDS measurements. |
Derechos: |
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Lengua: |
Anglès |
Documento: |
Article ; recerca ; Versió publicada |
Materia: |
Beam incidence angle ;
Fabrication method ;
Gallium indium phosphide ;
Influence of process parameters ;
Nanopillar formation ;
Raman measurements ;
Spatial densities ;
Ternary nanostructure |
Publicado en: |
Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol. 38, issue 1 (Jan. 2020) , art. 12801, ISSN 2166-2754 |
DOI: 10.1116/1.5127265
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Registro creado el 2020-11-18, última modificación el 2023-07-17