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A flexoelectric microelectromechanical system on silicon
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A flexoelectric microelectromechanical system on silicon
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Bhaskar, Umesh K.
(Institut Català de Nanociència i Nanotecnologia)
;
Banerjee, Nirupam
(University of Twente. Faculty of Science and Technology) ;
Abdollahi, Amir
(Institut Català de Nanociència i Nanotecnologia) ;
Wang, Zhe
(Cornell University. Department of Materials Science and Engineering) ;
Schlom, Darrell G.
(Cornell University. Department of Materials Science and Engineering) ;
Rijnders, Guus
(University of Twente. Faculty of Science and Technology) ;
Catalan, Gustau
(Institut Català de Nanociència i Nanotecnologia)
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