Room-temperature silicon platform for GHz-frequency nanoelectro-opto-mechanical systems
Navarro Urrios, Daniel (Institut Català de Nanociència i Nanotecnologia)
Colombano Sosa, Martin (Institut Català de Nanociència i Nanotecnologia)
Arregui Bravo, Guillermo (Institut Català de Nanociència i Nanotecnologia)
Madiot, Guilhem (Institut Català de Nanociència i Nanotecnologia)
Pitanti, Alessandro (Istituto di Nanoscienze and Scuola Normale Superiore (Pisa, Itàlia))
Griol, Amadeu (Universitat Politècnica de València. Nanophotonics Technology Center)
Makkonen, Tapani (VTT Technical Research Centre of Finland Ltd)
Ahopelto, Jouni (VTT Technical Research Centre of Finland Ltd)
Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia)
Martínez, Alejandro (Universitat Politècnica de València. Nanophotonics Technology Center)

Date:	2022
Abstract:	Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2. 6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.
Grants:	European Commission 885689 European Commission 713450 Agencia Estatal de Investigación PGC2018-094490-B-C21 Agencia Estatal de Investigación PGC2018-101743-B-I00 Ministerio de Economía y Competitividad SEV-2019-0706
Note:	Altres ajuts: . A.M. acknowledges support from MCIN (ICTS-2017-28-UPV-9), from Generalitat Valenciana (BEST/2020/178, PROMETEO/2019/123, and IDIFEDER/2021/061) and from "Unión Europea NextGenerationEU/PRTR"
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Cavity optomechanics ; Nanoelectro-opto-mechanical systems (NEOMS) ; Silicon photonics ; Interdigitated transducers ; Microwave-to-optics conversion
Published in:	ACS Photonics, Vol. 9, issue 2 (Feb. 2022) , p. 413-419, ISSN 2330-4022

DOI: 10.1021/acsphotonics.1c01614
PMID: 36193113

7 p, 2.9 MB

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Research literature > UAB research groups literature > Research Centres and Groups (research output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles