Development of hard X-ray photoelectron spectroscopy in liquid cells using optimized microfabricated silicon nitride membranes
Capone, F. (Sorbonne Université)
Muntada, O. (Institute of Microelectronics of Barcelona)
Ramírez, J. C. (Institut Català de Nanociència i Nanotecnologia)
Esplandiu Egido, Maria José (Institut Català de Nanociència i Nanotecnologia)
Dedryvère, R. (University of Pau & Pays Adour)
Grimaud, A. (Merkert Chemistry Center)
Lassalle-Kaiser, B. (Synchrotron SOLEIL)
Céolin, D. (Synchrotron SOLEIL)
Pérez Murano, Francesc (Institute of Microelectronics of Barcelona)
Rueff, J.-P. (Sorbonne Université)
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)

Date:	2024
Abstract:	We present first hard X-ray photoelectron spectroscopy (HAXPES) results of aqueous salt solutions and dispersions of gold nanoparticles in liquid cells equipped with specially designed microfabricated thin silicon nitride membranes, with thickness in the 15-25 nm range, mounted in a high-vacuum-compatible environment. The experiments have been performed at the HAXPES endstation of the GALAXIES beamline at the SOLEIL synchrotron radiation facility. The low-stress membranes are fabricated from 100 mm silicon wafers using standard lithography techniques. Platinum alignment marks are added to the chips hosting the membranes to facilitate the positioning of the X-ray beam on the membrane by detecting the corresponding photoemission lines. Two types of liquid cells have been used, a static one built on an Omicron-type sample holder with the liquid confined in the cell container, and a circulating liquid cell, in which the liquid can flow in order to mitigate the effects due to beam damage. We demonstrate that the membranes are mechanically robust and able to withstand 1 bar pressure difference between the liquid inside the cell and vacuum, and the intense synchrotron radiation beam during data acquisition. This opens up new opportunities for spectroscopic studies of liquids.
Grants:	European Commission 957189 European Commission 101007417 Agencia Estatal de Investigación CEX2021-001214-S Agencia Estatal de Investigación CEX2023-001397-M Agencia Estatal de Investigación PID2021-124568NB-I00 Agència de Gestió d'Ajuts Universitaris i de Recerca 2021/SGR-00644
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Hard X-ray photoelectron spectroscopy ; Silicon nitride membranes ; Microfabrication ; Aqueous solutions ; Nanoparticles ; Beam damage ; Synchrotron radiation
Published in:	Journal of Synchrotron Radiation, Vol. 31, Part 6 (November 2024) , p. 1505-1513, ISSN 1600-5775

DOI: 10.1107/S1600577524008865
PMID: 39405044

9 p, 10.3 MB

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Research literature > UAB research groups literature > Research Centres and Groups (research output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles