Diseño y fabricación de sistemas micro/nano electromecánicos integrados monolíticamente para aplicaciones de sensores de masa y sensores biológicos con palancas como elementos transductores - Villarroya Gaudó, María ; Barniol i Beumala, Núria, dir. (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
 
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