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246 p, 12.8 MB Monolithic packaging and transduction approaches for CMOS-MEMS resonators / Marigó Ferrer, Eloi ; Barniol i Beumala, Núria, dir. (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica
El gran increment en el rendiment dels MEMS i la seva aplicació a multitud de camps ha motivat la seva recerca i desenvolupament. Des de la primera demostració d'un MEMS, moltes aplicacions han sorgit, essent el camp dels sensors el seu sector més competitiu. [...]
The increasingly performance of MEMS and their applicability to a wide range of fields has motivated the research and development of such devices. From the first demonstration of MEMS several applications have grown being the field of sensors their most competitive area. [...]
[Barcelona] : Universitat Autònoma de Barcelona, 2013  
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