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4 p, 370.6 KB Combined laser and atomic force microscope lithography on aluminum : mask fabrication for nanoelectromechanical systems / Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Boisen, A. (Technical University of Denmark. Mikroelektronik Centret) ; Davis, Z. J. (Technical University of Denmark. Mikroelektronik Centret) ; Hansen, O. (Technical University of Denmark. Mikroelektronik Centret) ; Grey, F. (Technical University of Denmark. Mikroelektronik Centret) ; American Physical Society
A direct-write laser system and an atomic force microscope(AFM) are combined to modify thin layers of aluminum on an oxidizedsilicon substrate, in order to fabricate conducting and robust etch masks with submicron features. [...]
1999 - 10.1063/1.124106
Applied physics letters, Vol. 74, Issue 21 (March 1999) , p. 3206-3208  
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