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Local oxidation of silicon surfaces by dynamic force microscopy :
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Local oxidation of silicon surfaces by dynamic force microscopy : nanofabrication and water bridge formation
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García, Ricardo
(Instituto de Microelectrónica de Madrid)
;
Calleja, M.
(Instituto de Microelectrónica de Madrid) ;
Pérez Murano, Francesc
(Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ;
American Physical Society
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