Web of Science: 2 cites, Scopus: 3 cites, Google Scholar: cites,
Characterization of carbon-contaminated B4C-coated optics after chemically selective cleaning with low-pressure RF plasma
Moreno Fernández, Harol Aníbal (ALBA Laboratori de Llum de Sincrotró)
Rogler, D. (AXO DRESDEN GmbH)
Sauthier, Guillaume (Institut Català de Nanociència i Nanotecnologia)
Thomasset, M. (SOLEIL Synchrotron)
Dietsch, R. (AXO DRESDEN GmbH)
Carlino, V. (Ibss Group Inc)
Pellegrin, Eric (ALBA Laboratori de Llum de Sincrotró)

Data: 2018
Resum: Boron carbide (BC) is one of the few materials that is expected to be most resilient with respect to the extremely high brilliance of the photon beam generated by free electron lasers (FELs) and is thus of considerable interest for optical applications in this field. However, as in the case of many other optics operated at light source facilities, BC-coated optics are subject to ubiquitous carbon contaminations. Carbon contaminations represent a serious issue for the operation of FEL beamlines due to severe reduction of photon flux, beam coherence, creation of destructive interference, and scattering losses. A variety of BC cleaning technologies were developed at different laboratories with varying success. We present a study regarding the low-pressure RF plasma cleaning of carbon contaminated BC test samples via inductively coupled O/Ar, H/Ar, and pure O RF plasma produced following previous studies using the same ibss GV10x downstream plasma source. Results regarding the chemistry, morphology as well as other aspects of the BC optical coating before and after the plasma cleaning are reported. We conclude that among the above plasma processes only plasma based on pure O feedstock gas exhibits the required chemical selectivity for maintaining the integrity of the BC optical coatings.
Nota: Altres ajuts: Generalitat de Catalunya, Departament d'Empresa i Coneixement dins del programa "Doctorats Industrials" (dossier no. 2014 DI 037)
Drets: Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original. Creative Commons
Llengua: Anglès.
Document: article ; recerca ; publishedVersion
Publicat a: Scientific Reports, Vol. 8 (January 2018) , art. 1293, ISSN 2045-2322

DOI: 10.1038/s41598-018-19273-6
PMID: 29358628


13 p, 2.7 MB

El registre apareix a les col·leccions:
Documents de recerca > Documents dels grups de recerca de la UAB > Centres i grups de recerca (producció científica) > Ciències > Institut Català de Nanociència i Nanotecnologia (ICN2)
Articles > Articles de recerca
Articles > Articles publicats

 Registre creat el 2019-09-02, darrera modificació el 2019-09-30



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