Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona)
Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona)
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia)
Sansa Perna, Marc (Institut de Microelectrònica de Barcelona)
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)

Date:	2016
Abstract:	In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.
Grants:	European Commission 318804 Ministerio de Economía y Competitividad CSD2010-00024 Ministerio de Economía y Competitividad SEV-2013-0295
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Analysis of beams ; Buckling behaviors ; Curved shapes ; Force spectroscopy ; Mechanical bending ; Peak-force tappings ; Rectangular section ; Residual compressive stress
Published in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol. 34, Issue 6 (November 2016) , art. 6KK02, ISSN 2166-2754

DOI: 10.1116/1.4967930

6 p, 1.1 MB

The record appears in these collections:
Research literature > UAB research groups literature > Research Centres and Groups (research output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles