Web of Science: 1 citations, Scopus: 1 citations, Google Scholar: citations
Array of Microfluidic Beam Resonators for Density and Viscosity Analysis of Liquids
Márquez, Salomón (Institut Català de Nanociència i Nanotecnologia)
Álvarez, Mar (Institut de Microelectrònica de Barcelona)
Fariña, David (Institut Català de Nanociència i Nanotecnologia)
Homs Corbera, Antoni (Institut Català de Nanociència i Nanotecnologia)
Domínguez Horna, Carlos (Institut de Microelectrònica de Barcelona)
Lechuga, Laura M. (Institut Català de Nanociència i Nanotecnologia)

Date: 2017
Abstract: This paper reports on the design, fabrication, and evaluation of a mass density and viscosity sensor based on an array of polysilicon microbeam resonators integrated with 20 pL fluidic microchannels. When filled with water, resonators exhibit resonant frequencies close to 500 KHz and Q-factor values of 400 operating at atmospheric pressure and ambient temperature. Real-time measurements are highly reproducible and only require 250 μL of the sample fluid. The built-in interferometric readout enables automatic detection of the beams increasing the throughput analysis and reducing detection times. The frequency shift response shows a linear behavior in accordance with the density of evaluated solvents, organic solutions, and alcoholic drinks, reporting a mass responsivity of 7. 4 Hz/pg. Also, the sensor is capable of measuring the viscosity of liquid phase samples with a resolution of 0. 15 cP by tracking the Q-factor response of the sensor within a linear regime between 1 to 2. 6 cP. This approach demonstrates the ability to identify in real-time changes of fluids in the liquid phase that could provide a valuable assessment for bioanalytical applications.
Note: Número d'acord de subvenció AGAUR/2014/SGR-624
Note: Número d'acord de subvenció MINECO/SEV-2013-0295
Rights: Tots els drets reservats.
Language: Anglès
Document: article ; recerca ; acceptedVersion
Subject: Array ; Density ; Liquids ; Microfluidic channels ; Q-factor ; Resonators ; Resonant frequency ; Viscosity
Published in: Journal of microelectromechanical systems, Vol. 26, Issue 4 (August 2017) , p. 749-757, ISSN 1057-7157

DOI: 10.1109/JMEMS.2017.2709944

11 p, 1.1 MB

The record appears in these collections:
Research literature > UAB research groups literature > Research Centres and Groups (scientific output) > Experimental sciences > Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Articles > Research articles
Articles > Published articles

 Record created 2020-06-25, last modified 2020-08-01

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