Design, fabrication, and characterisation of wire grid polarizers for the deep UV spectral range - Rodriguez de Marcos, Luis (National University of Singapore. Singapore Synchrotron Light Source) ; Ong Bin, Leong (National University of Singapore. Physics Department) ; Asmara, Teguh Citra (National University of Singapore. Singapore Synchrotron Light Source) ; Heussler, Sascha Pierre (National University of Singapore. Singapore Synchrotron Light Source) ; Guerrero, Albert (Institut de Microelectrònica de Barcelona) ; Mas, Roser (Institut de Microelectrònica de Barcelona) ; Borrisé, Xavier (Institut Català de Nanociència i Nanotecnologia) ; Breese, Mark B. H. (National University of Singapore. Physics Department) ; Rusydi, Andrivo (National University of Singapore. Physics Department)