Design, fabrication, and characterisation of wire grid polarizers for the deep UV spectral range
Rodriguez de Marcos, Luis (National University of Singapore. Singapore Synchrotron Light Source)
Ong Bin, Leong (National University of Singapore. Physics Department)
Asmara, Teguh Citra (National University of Singapore. Singapore Synchrotron Light Source)
Heussler, Sascha Pierre (National University of Singapore. Singapore Synchrotron Light Source)
Guerrero, Albert (Institut de Microelectrònica de Barcelona)
Mas, Roser (Institut de Microelectrònica de Barcelona)
Borrisé, Xavier (Institut Català de Nanociència i Nanotecnologia)
Breese, Mark B. H. (National University of Singapore. Physics Department)
Rusydi, Andrivo (National University of Singapore. Physics Department)

Data:	2018
Resum:	In this communication, we show preliminary results on transmissive TiO wire-grid polarizers (WGP) operating in the deep ultraviolet (DUV) range. WGP are devices based on strips of materials with large values of the modulus of the dielectric constant along with high absorption in the operational range. The merit function I is introduced as a new tool to find the optimum material for WGPs in a given spectral range. The experimental dielectric constant of TiO thin films deposited by pulsed laser deposition are obtained through spectroscopic ellipsometry, and the function indicates that TiO is the best candidate for WGP in the DUV range when it is compared with other oxides. Once the material selection for WGP is done, we present and compare two different design approaches for WGP: one using an effective medium theory for the periodic structure, and the second using finite-difference time-domain (FDTD) analysis. A prototype of WGP is fabricated by electron beam (e-beam) lithography followed by lift-off process; the topography of the sample is analyzed by AFM, and we found noticeable deviations in the grating from the designed values. In preliminary characterization work the effective dielectric constant in two perpendicular orientations is obtained by ellipsometry and the contrast is compared with the design.
Drets:	Tots els drets reservats.
Llengua:	Anglès
Document:	Article ; recerca ; Versió publicada
Matèria:	Deep ultraviolet ; Design approaches ; Effective dielectric constants ; Effective medium theories ; Material selection ; Operational range ; Perpendicular orientation ; Wire grid polarizers
Publicat a:	Proceedings of SPIE, Vol. 10691 (2018) , art. 1069124, ISSN 1996-756X

DOI: 10.1117/12.2314459

16 p, 1.1 MB

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