Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
Pinto-Gómez, Christian (Institut de Microelectrònica de Barcelona)
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
Bausells Roige, Joan (Institut de Microelectrònica de Barcelona)
Villanueva, Luis Guillermo (École Polytechnique Fédérale de Lausanne)
Fernández-Regúlez, Marta (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)

Date:	2020
Abstract:	Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators.
Grants:	Ministerio de Economía y Competitividad TEC2015-69864-R Agencia Estatal de Investigación RTI2018-102007-B-I00 European Commission 665919 European Commission 654384 Agencia Estatal de Investigación BES-2016-076407
Rights:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Language:	Anglès
Document:	Article ; recerca ; Versió publicada
Subject:	Block copolymers ; Directed self-assembly ; Graphoepitaxy ; Nanolithography ; Nanomechanical devices ; Nanowires
Published in:	Polymers, Vol. 12, Issue 10 (October 2020) , art. 2432, ISSN 2073-4360

DOI: 10.3390/polym12102432
PMID: 33096908

20 p, 3.1 MB

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