Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images
Ledesma, Eyglis (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Torres, Francesc 1948- (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)

Data:	2024
Resum:	This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound imaging systems and capabilities to obtain resolutions under 100 μ m. The system-on-chip (SoC) consists of 7 × 7 AlScN PMUTs connected in a 1-D configuration where the six external rows are used to generate the acoustic pressure through three high-voltage (HV)-pulser CMOS circuits, and the central row is used to sense the incoming ultrasound wave which will be amplified by a low-noise amplifier (LNA) CMOS amplifier. The experimental verification in a liquid environment gave, as a first result, a peak frequency of 7. 7 MHz with a normalized pressure (ST) of 1. 98 k Pa_ pp ∗mm∗V-1 and receiving sensitivity (SR) of 3. 3 V/MPa, respectively, competitive sensitivities in comparison to the state-of-the-art. In the second part, ultrasonic imaging for different wires with a minimum diameter of 25 μ m was demonstrated as expected from numerical simulations. The system's performance for ultrasound images was evaluated considering the product of the area and the resolution at 1 mm, giving competitive values compared with other reported ultrasound systems for catheter-based medical ultrasound imaging and the only one providing monolithic integration with the CMOS front-end circuitry.
Ajuts:	Agencia Estatal de Investigación PID2019-108270RB-I00 Agencia Estatal de Investigación PID2022-136624OB-I00
Nota:	Altres ajuts: acords transformatius de la UAB
Drets:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Llengua:	Anglès
Document:	Article ; recerca ; Versió publicada
Matèria:	AlScN piezoelectric micromachined ultrasonic transducer (PMUT) ; Catheter-based ultrasound systems ; High resolution ; PMUTs ; PMUT-on-CMOS ; Ultrasound images
Publicat a:	IEEE sensors journal, Vol. 24, Issue 10 (May 2024) , p. 15954-15966, ISSN 1558-1748

DOI: 10.1109/JSEN.2024.3385911

13 p, 14.9 MB

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