Measuring electrical current during scanning probe oxidation
Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Martín Olmos, Cristina (Institut de Microelectrònica de Barcelona)
Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
Kuramochi, H. (Nanotechnology Research Institute (Ibaraki, Japó))
Yokoyama, H. (Nanotechnology Research Institute (Ibaraki, Japó))
Dagata, J. A. (National Institute of Standards and Technology (Gaithersburg, Estats Units d'Amèrica))
American Physical Society

Fecha:	2003
Resumen:	Electrical current is measured during scanning probe oxidation by performing force versus distance curves under the application of a positive sample voltage. It is shown how the time dependence of the current provides information about the kinetics of oxide growth under conditions in which the tip-surface distance is known unequivocally during current acquisition. Currentmeasurements at finite tip-sample distance, in particular, unveil how the geometry of the meniscus influences its electrical conduction properties as well as the role of space charge at very small tip-sample distances.
Derechos:	Tots els drets reservats.
Lengua:	Anglès
Documento:	Article ; recerca ; Versió publicada
Materia:	Electric currents ; Electric measurements ; Oxidation ; Charged currents ; Electrical properties
Publicado en:	Applied physics letters, Vol. 82, Issue 18 (April 2003) , p. 3086-3088, ISSN 1077-3118

DOI: 10.1063/1.1572480

4 p, 227.5 KB

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