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| Pàgina inicial > Articles > Articles publicats > Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Films |
(University of Antwerp. Department of Bioscience Engineering) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Katholieke Universiteit te Leuven (1970-)) (Vrije Universiteit Brussel. Department of Materials and Chemistry) (Institut Català de Nanociència i Nanotecnologia) (Institut Català de Nanociència i Nanotecnologia) (Imec) (Imec) (Katholieke Universiteit te Leuven (1970- ). Department of Chemistry) (Vrije Universiteit Brussel. Department of Materials and Chemistry) (Katholieke Universiteit te Leuven (1970-))
| Data: | 2023 |
| Resum: | Vapor-phase film deposition of metal-organic frameworks (MOFs) would facilitate the integration of these materials into electronic devices. We studied the vapor-phase layer-by-layer deposition of zeolitic imidazolate framework 8 (ZIF-8) by consecutive, self-saturating reactions of diethyl zinc, water, and 2-methylimidazole on a substrate. Two approaches were compared: (1) Direct ZIF-8 "molecular layer deposition" (MLD), which enables a nanometer-resolution thickness control and employs only self-saturating reactions, resulting in smooth films that are crystalline as-deposited, and (2) two-step ZIF-8 MLD, in which crystallization occurs during a postdeposition treatment with additional linker vapor. The latter approach resulted in a reduced deposition time and an improved MOF quality, i. e. , increased crystallinity and probe molecule uptake, although the smoothness and thickness control were partially lost. Both approaches were developed in a modified atomic layer deposition reactor to ensure cleanroom compatibility. |
| Ajuts: | European Commission 716472 Agencia Estatal de Investigación SEV-2017-0706 European Commission 765378 European Commission 730872 |
| Drets: | Aquest material està protegit per drets d'autor i/o drets afins. Podeu utilitzar aquest material en funció del que permet la legislació de drets d'autor i drets afins d'aplicació al vostre cas. Per a d'altres usos heu d'obtenir permís del(s) titular(s) de drets.  |
| Llengua: | Anglès |
| Document: | Article ; recerca ; Versió acceptada per publicar |
| Matèria: | Deposition of metals ; Electronics devices ; Film deposition ; Metalorganic frameworks (MOFs) ; Molecular layer deposition ; Phase layers ; Vapor Phase ; Vapor phasis ; Vapour-phase ; Zeolitic imidazolate framework-8 |
| Publicat a: | Chemistry of materials, Vol. 35, Issue 4 (February 2023) , p. 1684-1690, ISSN 1520-5002 |
10 p, 957.2 KB |
